%0 Journal Article
%T Development of 3D Force Sensors for Nanopositioning and Nanomeasuring Machine
%A Arti Tibrewala
%A Norbert Hofmann
%A Anurak Phataralaoha
%A Gerd J£¿ger
%A Stephanus B¨¹ttgenbach
%J Sensors
%D 2009
%I MDPI AG
%R 10.3390/s90503228
%X In this contribution, we report on different miniaturized bulk micro machined three-axes piezoresistive force sensors for nanopositioning and nanomeasuring machine (NPMM). Various boss membrane structures, such as one boss full/cross, five boss full/cross and swastika membranes, were used as a basic structure for the force sensors. All designs have 16 p-type diffused piezoresistors on the surface of the membrane. Sensitivities in x, y and z directions are measured. Simulated and measured stiffness ratio in horizontal to vertical direction is measured for each design. Effect of the length of the stylus on H:V stiffness ratio is studied. Minimum and maximum deflection and resonance frequency are measured for all designs. The sensors were placed in a nanopositioning and nanomeasuring machine and one point measurements were performed for all the designs. Lastly the application of the sensor is shown, where dimension of a cube is measured using the sensor.
%K Force sensors
%K diffused piezoresistors
%K swastika membrane
%K 3D measurements
%K NPMM
%U http://www.mdpi.com/1424-8220/9/5/3228