%0 Journal Article
%T Determination of Chlorosilanes by Gas Chromatography<br>氯硅烷的气相色谱分析
%A Shen Yiwen
%A Qu Jichuan
%A Zhang Hongdu
%A <br>沈怡文
%A 曲吉川
%A 张洪度
%J 色谱
%D 1997
%I 
%X Chlorosilanes are the essential raw material of SiC fibre made by "CVD (chemical vapour deposition)" method. The purity of chlorosilane affects the quality of SiC fibre obtained. Therefore, a simple and reliable method for the determination of the constituent of chlorosilane is needed. A gas chromatographic method for quantitative analysis of chlorosilane is described in this paper. The gas chromatographic conditions were as follows: column, 10% diethyl phthalate on 6201 support (60-80 mesh), 3m x 5mm i.d. stainless-steel column; column temp., 60 degrees C; injection temp., 110 degrees C; thermal conductivity detector temp., 140 degrees C carrier gas H2 with flow rate of 60 mL/min. The results show that the method is simple and rapid, and has good precision and reproducibility. The coefficient of variation of the method was less than 1% (n = 6).
%K gas
%K chromatography
%K chlorosilanes<br>气相色谱法
%K 氯硅烷
%K 甲基三氯硅烷
%K 甲基二氯硅烷
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=6579068328FE643F&jid=4D81E042D77AFEC6881D14759692069C&aid=A0C7CB2C65AD7C6D200F31BA088244D8&yid=5370399DC954B911&vid=23CCDDCD68FFCC2F&iid=38B194292C032A66&sid=28F9D9CF04F424FF&eid=002786F01A86D891&journal_id=1000-8713&journal_name=色谱&referenced_num=2&reference_num=1