%0 Journal Article
%T A Standard CMOS Humidity Sensor without Post-Processing
%A Oleg Nizhnik
%A Kohei Higuchi
%A Kazusuke Maenaka
%J Sensors
%D 2011
%I MDPI AG
%R 10.3390/s110606197
%X A 2 ¦ÌW power dissipation, voltage-output, humidity sensor accurate to 5% relative humidity was developed using the LFoundry 0.15 ¦Ìm CMOS technology without post-processing. The sensor consists of a woven lateral array of electrodes implemented in CMOS top metal, a Intervia Photodielectric 8023-10 humidity-sensitive layer, and a CMOS capacitance to voltage converter.
%K capacitive sensors
%K microsensors
%K humidity measurement
%K CMOS integrated circuits
%U http://www.mdpi.com/1424-8220/11/6/6197