%0 Journal Article
%T Tribological Property of Diamond-Like Carbon Film at Different Humidity in Air<br>相对湿度对类金刚石薄膜摩擦磨损性能的影响
%A WANG Cheng-bing
%A LI Hong-xuan
%A XU Tao
%A <br>王成兵
%A 李红轩
%A 徐洮
%J 摩擦学学报
%D 2005
%I 
%X Diamond-like carbon films were successfully deposited on Si substrate by plasma enhanced chemical vapor deposition(PECVD).Friction and wear behaviors of DLC film sliding against a Si3N4 ball at different humidity(5%,20%,40%,60%,80%,and 100%)were measured using a roating-type ball-on-disk tribometer in air. Friction surfaces of the films and Si_3N_4 balls wear were investigated by scanning electron microscope(SEM), and by X-ray photoelectron spectroscopy (XPS). It was found that surface of DLC coating was oxidized by a tribochemical reaction which caused an increase in friction coefficient and wear rate when relative humidity of test environment increased.
%K DLC film
%K friction and wear behavior
%K humidity<br>类金刚石薄膜
%K 摩擦磨损性能
%K 相对湿度
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=9E7F52705CD29352&yid=2DD7160C83D0ACED&vid=C5154311167311FE&iid=94C357A881DFC066&sid=BA48F0B914ED890A&eid=389DA78D878702A9&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=5&reference_num=12