%0 Journal Article
%T Effects of Relative Humidity on Surface Adhesion<br>相对湿度对材料表面粘附力影响的研究
%A QING Tao
%A SHAO Tian-min
%A WEN Shi-zhu
%A <br>卿涛
%A 邵天敏
%A 温诗铸
%J 摩擦学学报
%D 2006
%I 
%X Effects of relative humidity on surface adhesion force of Si(100) wafer were studied under micro-scale loads using a self-built apparatus.Based on BET adsorption model,a formula was built to calculate adhesion force,which includes the contribution of capillary force of water film and Van der Waals force under different relative humidity.The test results indicated that adhesion force ascended with the relative humidity.Under lower relative humidity(less than 20%),its influence on adhesion force was not significant. When the relative humidity varying from 40% to 80%,adhesion force demonstrated a remarkable increase with the humidity,and reached to a relatively stable value at higher relative humidity of 90%.
%K adhesion force
%K relative humidity
%K capillary force
%K Van der Waals force<br>粘附力
%K 相对湿度
%K 毛细力
%K 范德华力
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=93B7FAE6CCBD4D0B&yid=37904DC365DD7266&vid=96C778EE049EE47D&iid=E158A972A605785F&sid=AF507FDD66D991DA&eid=BF112261B65CB9C9&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=0&reference_num=14