%0 Journal Article
%T Structure and Tribological Properties of Al-DLC Films Prepared by Medium Frequency Magnetron Sputtering<br>中频磁控溅射沉积含铝类金刚石碳膜结构及其摩擦磨损性能研究
%A ZHANG Guang-an
%A WANG Peng
%A CHEN You-ming
%A WANG Xi
%A YAN Peng-xun
%A ZHANG Jun-yan
%A <br>张广安
%A 王鹏
%A 陈友明
%A 王霞
%A 闫鹏勋
%A 张俊彦
%J 摩擦学学报
%D 2008
%I 
%X 采用中频磁控溅射技术在单晶硅表面制备含铝类金刚石(Al-DLC)薄膜,利用原子力显微镜、X射线光电子能谱仪、红外光谱仪、纳米压痕仪和微摩擦磨损试验机等考察薄膜表面形貌、结构及其摩擦磨损性能.结果表明:所制备的Al-DLC薄膜均匀、致密,表面粗糙度小,应力较低,硬度较高;薄膜与Si3N4陶瓷球对摩时显示出良好抗磨减摩性能;加基底偏压所制备薄膜的摩擦系数明显降低, 耐磨寿命显著提高.
%K 中频磁控溅射
%K Al-DLC薄膜
%K 摩擦磨损性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=2C1DB1D6C2B18DF0E0B7E457486A371D&yid=67289AFF6305E306&vid=D3E34374A0D77D7F&iid=0B39A22176CE99FB&sid=7F5DDA4924737DF5&eid=B62E0EEFE746E568&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=2&reference_num=18