%0 Journal Article
%T Effect of Bias and Environment on the Tribological Behavior of Diamond-like Carbon Films by Linear Ion Source<br>偏压及测试环境对离子束DLC膜摩擦学行为的影响
%A ZHAO Bo-tong
%A DAI Wei
%A KE Pei-ling
%A WANG Ai-ying
%A <br>赵博通
%A 代伟
%A 柯培玲
%A 汪爱英
%J 摩擦学学报
%D 2011
%I 
%X Diamond-like carbon films were deposited on p-Si(100) substrates by a linear anode layer ion beam system using the precursor gas of methane. Effects of the substrate negative bias and the testing environment on the tribological behaviors of the films were considered. Results show that hardness and elastic modulus reached their maximum at the substrate bias of -50 V. When testing in ambient air, films prepared at various substrate bias exhibited good anti-wear property, and there was no significant difference between their tribological behaviors. Also, friction coefficients were very sensitive to the testing environment, mainly as a result of the tribochemical reaction at the tribological interface.
%K linear anode layer ion source
%K DLC
%K substrate negative bias
%K tribology<br>阳极层离子源
%K DLC
%K 衬底负偏压
%K 摩擦学行为
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=51CDEEA2FDA11B942DBE7E13E731333B&yid=9377ED8094509821&vid=4AD960B5AD2D111A&iid=94C357A881DFC066&sid=25467A5A28500A25&eid=C4BBAD7A2DCC89BC&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=0&reference_num=15