%0 Journal Article
%T Preparation and Study of the Tribological Properties of Tetrahedral Amorphous Carbon Film<br>四面体无定型无氢非晶碳膜的制备及其摩擦学性能研究
%A YU Xiang
%A ZHANG Xu
%A WANG Cheng-biao
%A LIU Xing-ju
%A FU Yu-na
%A <br>于翔
%A 张旭
%A 王成彪
%A 刘兴举
%A 傅玉娜
%J 摩擦学学报
%D 2005
%I 
%X A series of tetrahedral amorphous carbon films (ta-C) were deposited on silicon wafer Si(100)], W18Cr4V high-speed steel, and Cr18Ni9 stainless steel substrates using a pulsed filtered cathodic vacuum arc system. The mechanical properties, adhesion to substrate, and friction and wear behaviors of the resulting ta-C films were investigated. The effects of the substrate and film thickness on the adhesion to substrate and tribological behaviors of the ta-C films were also examined. It was found that that the ta-C film deposited on the high-speed steel substrate had good comprehensive properties. Namely, it had a microhardness as high as 76 GPa and elastic modulus as high as 453 GPa, while its critical adhesive force (Lc) was as high as 41 N and friction coefficient as small as 0.12. At the same time, the friction coefficient of this kept almost unchanged up to a rotary cycle of 16 000. Therefore, it was rational to predict that the ta-C film deposited on the high-speed steel substrate could be used as a high-quality antiwear and protective coating for various parts made of high-speed steel.
%K magnetic filtered vacuum arc
%K deposition
%K tetrahedral amorphous carbon
%K tribological properties<br>磁过滤真空弧
%K 沉积
%K 无氢非晶碳膜(ta-C)
%K 摩擦学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=543868EDC1869A16&yid=2DD7160C83D0ACED&vid=C5154311167311FE&iid=0B39A22176CE99FB&sid=5E25104E99903E8A&eid=12DC19455C3A2FA8&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=2&reference_num=13