%0 Journal Article
%T Progress of Wear Properties on Micro-Electro-Mechanical Systems<br>微机电系统磨损特性研究进展
%A ZHANG Wen-ming
%A MENG Guang
%A <br>张文明
%A 孟光
%J 摩擦学学报
%D 2005
%I 
%X Current state and progress of studies of wear on micro-electro-mechanical systems (MEMS), particular in micro rotating machines, are summarized in detail. Various wear behavior of MEMS and micro rotating machines are introduced and effects of material properties, roughness, environments, loadings and working conditions on wear are briefed. Many kinds of wear models, analysis methods, testing method and experiment instruments are discussed. Furthermore, prospect is also provided concerning further work in MEMS and micro rotating machines.
%K MEMS
%K wear behavior
%K surface modification<br>微机电系统(MEMS)
%K 磨损性能
%K 表面改性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=4F50A46A327EC156&yid=2DD7160C83D0ACED&vid=C5154311167311FE&iid=94C357A881DFC066&sid=F176272DD933A0BB&eid=3F419E61BD389CC8&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=5&reference_num=37