%0 Journal Article
%T Fabrication and Tribological Characterization of Multilayer C/C Films Prepared by Filtered Cathodic Vacuum Arc Technology<br>磁过滤真空弧源沉积技术制备C/C多层类金刚石膜及其摩擦磨损性能研究
%A GOU Yin-ning
%A SUN Hong
%A HUANG Nan
%A ZHANG Wen-ying
%A LENG Yong-xiang
%A <br>沟引宁
%A 孙鸿
%A 黄楠
%A 张文英
%A 冷永祥
%J 摩擦学学报
%D 2006
%I 
%X 采用磁过滤直流阴极真空弧源沉积技术在Si基体和GCr15基体表面制备了C/C多层DLC膜,通过X射线光电子能谱仪分析薄膜结构特征;用原子力显微镜观察C/C多层DLC膜的表面形貌;采用台阶仪测试薄膜厚度;利用纳米硬度仪测试薄膜纳米硬度;在销盘式摩擦磨损试验机上进行C/C多层DLC膜在大气下的摩擦性能评价,同时比较了单层DLC膜、TiN膜和C/C多层DLC膜的耐磨性能.结果表明:C/C多层DLC膜表面光滑、致密,厚度达0.7 μm,硬度高达68 GPa,与SiC球对摩时的摩擦系数为0.10左右,耐磨性明显优于单层DLC膜和TiN膜.
%K filtered cathodic vacuum arc(FCVA)
%K C/C multilayer films
%K friction and wear behavior<br>磁过滤阴极真空弧源
%K C/C多层DLC膜
%K 摩擦磨损性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=798C5F186026BA9D&yid=37904DC365DD7266&vid=96C778EE049EE47D&iid=0B39A22176CE99FB&sid=CDEBD1ACE0A4C1C1&eid=2F56B21F91C9B05B&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=8&reference_num=9