%0 Journal Article
%T Progress of Micro-tribology on Micro-electro-mechanical Systems<br>微机电系统的微观摩擦学研究进展
%A DENG Zhao
%A RAO Wen qi
%A REN Tian hui
%A YU Lai gui
%A LIU Wei min
%A <br>邓昭
%A 余来贵
%J 摩擦学学报
%D 2001
%I 
%X The current state and progress of the micro tribological studies on micro electro mechanical systems (MEMS) are summarized. Various new features of the friction and wear behavior of the MEMS are introduced. And the effects of the material properties, environments and working conditions on the operation of MEMS are briefed. The lubrication of MEMS is elucidated with a viewpoint of nano tribology, while the application of surface modification and ultra thin film lubrication for MEMS is discussed. Moreover, a prospect is also provided concerning further work on the micro and nano tribology on MEMS.
%K MEMS
%K micro
%K tribology
%K surface modification
%K ultra
%K thin film
%K lubrication<br>微机电系统
%K 微观摩擦学
%K 表面改性
%K 薄膜
%K 超润滑
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=02F2E63C738F2E72&yid=14E7EF987E4155E6&vid=659D3B06EBF534A7&iid=B31275AF3241DB2D&sid=3F419E61BD389CC8&eid=E3C3E274D87A8C16&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=14&reference_num=27