%0 Journal Article
%T Influence of Heat-Treatment on Mechanical and Frictional Properties of DLC Films with and without Ti Underlayer<br>热处理对类金刚石碳薄膜力学和摩擦性能的影响
%A JIANG Xiao-hong~
%A JIN Yuan-sheng~
%A KAZACHENKO V P~
%A POPOV A N~
%A ROGACHEV A V~
%A <br>江晓红
%A 金元生
%A KAZACHENKOVP
%A POPOVAN
%A ROGACHEVAV
%J 摩擦学学报
%D 2004
%I 
%X 利用直流磁分离及脉冲阴极双激发源等离子弧薄膜沉积装置制备了含Ti底层和无Ti底层的类金刚石碳薄膜(DLC);采用纳米硬度计、原子力显微镜和X射线光电子能谱仪分析了薄膜的力学性能和结构;采用УСК-1型球-盘滑动摩擦磨损试验机考察了薄膜的摩擦性能.结果表明,同无Ti底层的DLC薄膜相比,含Ti底层的DLC薄膜的硬度和弹性模量较低;含Ti底层的DLC薄膜经真空400℃退火后表面层中存在TiO2,内部存在TiC;而无Ti底层的DLC薄膜经真空500℃退火处理后硬度、弹性模量和表面形貌几乎保持不变;无Ti底层的DLC薄膜经空气中500℃退火后摩擦系数明显降低,这是由于DLC薄膜在空气中热处理时更易发生石墨化所致.
%K diamond-like carbon film
%K Ti underlayer
%K heat treatment
%K mechanical behavior
%K friction behavior<br>类金刚石碳薄膜
%K Ti底层
%K 热处理
%K 力学性能
%K 摩擦性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=DE60E615C4341F5B&yid=D0E58B75BFD8E51C&vid=B91E8C6D6FE990DB&iid=38B194292C032A66&sid=D2742EEE6F4DF8FE&eid=1B64850025D0BBBE&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=1&reference_num=13