%0 Journal Article
%T Effect of DC Negative Bias on the Structure and Tribological Properties of Silicon Containing Diamond-like Carbon Films<br>偏压对硅掺杂类金刚石碳膜力学及摩擦学性能的影响
%A YANG Bao-Ping
%A ZHENG Yu
%A ZHANG Bin
%A ZHANG Jun-Yan
%A <br>杨保平
%A 郑愉
%A 张斌
%A 张俊彦
%J 摩擦学学报
%D 2012
%I 
%X Due to the deposition of C on Si target during the deposition process, we can use this target poisoning phenomenon to deposit DLC film with trace or low Si, the Si-DLC films with different structures were prepared via different negative bias application. The structure, cross-sections, composition, mechanical and tribological properties of the films was systemically investigated by XPS, Raman spectra, scanning electron microscopy, nano-indenter and tribo-tester. The results show that the content of sp3 hybrid carbon was increased as the Si doped, and Si-doping could release the internal stress and increase adhesion to silicon substrate. The Si-DLC film prepared at bias of -600 V exhibited higher hardness, higher adhesion, lower friction coefficient about 0.018 and lower wear rate about 1.60×10-16 m3/(N·m) in the ambient atmosphere.
%K bias
%K magnetron sputtering
%K Si-DLC
%K tribological properties<br>偏压
%K 磁控溅射
%K Si-DLC
%K 摩擦学性能
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=DC0994A58AFB6AE91BEFBD97E418EE6D&yid=99E9153A83D4CB11&vid=9971A5E270697F23&iid=B31275AF3241DB2D&sid=20ED669EB429E15C&eid=DB7B2C790D19BE6E&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=0&reference_num=26