%0 Journal Article
%T Preparation and Friction Behavior of Perfluoropolyether Lubricant Film on Single Crystal Silicon<br>单晶硅表面全氟聚醚润滑膜的制备及摩擦特性研究
%A WANG Jin qing
%A YANG Sheng rong
%A QI Shang kui
%A YU Lai gui
%A <br>王金清
%A 杨生荣
%J 摩擦学学报
%D 2001
%I 
%X Polar perfluoropolyether lubricant film has been fabricated on single crystal silicon by dip coating technique. The contact angles of distilled water droplet on the single crystal surface and the lubricant film surface were measured with a contact angle meter and the chemical states of C of the film determined with an X ray photoelectron spectrometer. The friction behavior of the film in sliding against SAE52100 steel was investigated with a DF PM dynamic static friction coefficient procession measurement apparatus. As the results, perfluoropolyether lubricant film is successfully prepared on single crystal surface by dip coating process and the resultant lubricant film shows a considerably decreased friction coefficient than the single crystal silicon substrate, in sliding against the steel.
%K single crystal silicon
%K perfluoropolyether lubricant film
%K contact angle
%K friction behavior<br>单晶硅
%K 全氟聚醚润滑膜
%K 接触角
%K 摩擦特性
%K 制备
%K 微型机械
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=27CD34C06BFD9137&yid=14E7EF987E4155E6&vid=659D3B06EBF534A7&iid=B31275AF3241DB2D&sid=238BD7580EFCC5AE&eid=B79ACB6EBBFC9730&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=7&reference_num=16