%0 Journal Article
%T Research Progress in Tribo-Electrochemistry and Tribo-Electrochemical Polishing<br>摩擦电化学与摩擦电化学研磨抛光研究进展
%A ZHAI Wen-jie
%A <br>翟文杰
%J 摩擦学学报
%D 2006
%I 
%X A review is given on the current state and recent progress in the research of tribo-electrochemistry in aqueous media and non-aqueous media, respectively, with special attention being paid to the triboelectrochemical mechanisms for the control of friction and wear. Along with a summary on the conventional polishing principles of hard and brittle materials, the tribo-electrochemical polishing method is proposed. Preliminary test results show that tribo-electrochemical polishing is promising to become the critical technology in the high efficient polishing and planarization of microelectronic materials.
%K tribo-electrochemistry
%K corrosive wear
%K friction control
%K tribo-electrochemical polishing<br>摩擦电化学
%K 腐蚀磨损
%K 摩擦控制
%K 摩擦电化学研抛
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=5D344E2AD54D14F8&jid=2F467A5C6371C830162AAA01D7DAD07A&aid=435648DE07520E4B&yid=37904DC365DD7266&vid=96C778EE049EE47D&iid=CA4FD0336C81A37A&sid=08805F9252973BA4&eid=6700D0D256586E73&journal_id=1004-0595&journal_name=摩擦学学报&referenced_num=1&reference_num=48