%0 Journal Article
%T Dynamic Characteristics of a Hydraulic Amplification Mechanism for Large Displacement Actuators Systems
%A Xavier Arouette
%A Yasuaki Matsumoto
%A Takeshi Ninomiya
%A Yoshiyuki Okayama
%A Norihisa Miki
%J Sensors
%D 2010
%I MDPI AG
%R 10.3390/s100402946
%X We have developed a hydraulic displacement amplification mechanism (HDAM) and studied its dynamic response when combined with a piezoelectric actuator. The HDAM consists of an incompressible fluid sealed in a microcavity by two largely deformable polydimethylsiloxane (PDMS) membranes. The geometry with input and output surfaces having different cross-sectional areas creates amplification. By combining the HDAM with micro-actuators, we can amplify the input displacement generated by the actuators, which is useful for applications requiring large deformation, such as tactile displays. We achieved a mechanism offering up to 18-fold displacement amplification for static actuation and 12-fold for 55 Hz dynamic actuation.
%K hydraulic amplification
%K liquid encapsulation
%K dynamic actuation
%K tactile display
%K MEMS
%U http://www.mdpi.com/1424-8220/10/4/2946