%0 Journal Article
%T Fabrication and properties of anodic alumina humidity sensor with through-hole structure
%A ZhiYuan Ling
%A ShuoShuo Chen
%A JinChi Wang
%A Yi Li
%A <br>
%J 科学通报(英文版)
%D 2008
%I 
%X Through-hole structural humidity sensor was fabricated by radio-frequency magnetron sputtering deposition of gold electrodes on two sides of anodic aluminum oxide (AAO) membranes which were prepared by two-step anodization procedure at 0–5°C and 40 V in 0.5 mol/L oxalic acid electrolyte. The investigation on the impedance at various humid conditions showed a linear relationship between impedance and relative humidity over the range of 12%–97% RH. Other excellent properties such as rapid response and good reproducibility were also obtained. Supported by the research fund of Key Lab of Specially Functional Materials, Ministry of Education, China
%K humidity sensor
%K anodic aluminum oxide
%K nanopore electrode<br>湿度传感器
%K 氧化铝
%K 阳极
%K 纳米电极
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=01BA20E8BA813E1908F3698710BBFEFEE816345F465FEBA5&cid=96E6E851B5104576C2DD9FC1FBCB69EF&jid=DD6615BC9D2CFCE0B6F945E8D5314523&aid=155B336B4BA579A6A8117DF0A7706EC9&yid=67289AFF6305E306&vid=8E6AB9C3EBAAE921&iid=0B39A22176CE99FB&sid=DD74772618543076&eid=3E0812ED84A7B31D&journal_id=1001-6538&journal_name=科学通报(英文版)&referenced_num=0&reference_num=17