%0 Journal Article
%T Quantitative Accelerated Life Testing of MEMS Accelerometers
%A Marius Bazu
%A Lucian G£żl£ż£żeanu
%A Virgil Emil Ilian
%A Jerome Loicq
%A Serge Habraken
%A Jean-Paul Collette
%J Sensors
%D 2007
%I MDPI AG
%R 10.3390/s7112846
%X Quantitative Accelerated Life Testing (QALT) is a solution for assessing thereliability of Micro Electro Mechanical Systems (MEMS). A procedure for QALT is shownin this paper and an attempt to assess the reliability level for a batch of MEMSaccelerometers is reported. The testing plan is application-driven and contains combinedtests: thermal (high temperature) and mechanical stress. Two variants of mechanical stressare used: vibration (at a fixed frequency) and tilting. Original equipment for testing at tiltingand high temperature is used. Tilting is appropriate as application-driven stress, because thetilt movement is a natural environment for devices used for automotive and aerospaceapplications. Also, tilting is used by MEMS accelerometers for anti-theft systems. The testresults demonstrated the excellent reliability of the studied devices, the failure rate in theĦ°worst caseĦħ being smaller than 10-7h-1.
%K reliability
%K accelerometers
%K MEMS
%K tilting
%K vibration.
%U http://www.mdpi.com/1424-8220/7/11/2846