%0 Journal Article
%T High-temperature MEMS Heater Platforms: Long-term Performance of Metal and Semiconductor Heater Materials
%A Jan Spannhake
%A Olaf Schulz
%A Andreas Helwig
%A Angelika Krenkow
%A Gerhard M¨šller
%A Theodor Doll
%J Sensors
%D 2006
%I MDPI AG
%R 10.3390/s6040405
%X Micromachined thermal heater platforms offer low electrical power consumptionand high modulation speed, i.e. properties which are advantageous for realizing non-dispersive infrared (NDIR) gas- and liquid monitoring systems. In this paper, we report oninvestigations on silicon-on-insulator (SOI) based infrared (IR) emitter devices heated byemploying different kinds of metallic and semiconductor heater materials. Our resultsclearly reveal the superior high-temperature performance of semiconductor over metallicheater materials. Long-term stable emitter operation in the vicinity of 1300 K could beattained using heavily antimony-doped tin dioxide (SnO2:Sb) heater elements.
%K Hotplate
%K heater metallisation
%K high-temperature stability
%K electro-migration
%K doped silicon
%K doped metal oxide
%K antimony doped tin oxide.
%U http://www.mdpi.com/1424-8220/6/4/405