%0 Journal Article
%T Functional Testing and Characterisation of ISFETs on Wafer Level by Means of a Micro-droplet Cell
%A Arshak Poghossian
%A Kerstin Schumacher
%A Joachim P. Kloock
%A Christian Rosenkranz
%A Joachim W. Schultze
%A Mattea M¨¹ller-Veggian
%A Michael J. Sch£¿ning
%J Sensors
%D 2006
%I MDPI AG
%R 10.3390/s6040397
%X A wafer-level functionality testing and characterisation system for ISFETs (ion-sensitive field-effect transistor) is realised by means of integration of a specifically designedcapillary electrochemical micro-droplet cell into a commercial wafer prober-station. Thedeveloped system allows the identification and selection of ¡°good¡± ISFETs at the earlieststage and to avoid expensive bonding, encapsulation and packaging processes for non-functioning ISFETs and thus, to decrease costs, which are wasted for bad dies. Thedeveloped system is also feasible for wafer-level characterisation of ISFETs in terms ofsensitivity, hysteresis and response time. Additionally, the system might be also utilised forwafer-level testing of further electrochemical sensors.
%K ISFET
%K wafer-level testing
%K capillary micro-droplet cell.
%U http://www.mdpi.com/1424-8220/6/4/397