%0 Journal Article
%T Fabrication of Thin-Film LAPS with Amorphous Silicon
%A Tatsuo Yoshinobu
%A Michael J. Sch£¿ning
%A Friedhelm Finger
%A Werner Moritz
%A Hiroshi Iwasaki
%J Sensors
%D 2004
%I MDPI AG
%R 10.3390/s41000163
%X To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.
%K LAPS
%K chemical imaging sensor
%K amorphous silicon
%K pH sensor
%U http://www.mdpi.com/1424-8220/4/10/163