%0 Journal Article
%T EWMA for run-to-run control with time-varying discount factor in high-mix process<br>基于变折扣因子EWMA的混合产品批间控制方法
%A Hou Ming-yang
%A zheng ying
%A Ai Bing
%A Zheng Yan
%A Zhang Jie
%A <br>侯明阳
%A 郑英
%A 艾兵
%A 郑燕
%A 张杰
%J 控制理论与应用
%D 2009
%I 
%X Run-to-run(R2R) control is widely adopted in semiconductor manufacturing industries. Exponent weighted moving average(EWMA) is an important R2R algorithm. Discount factor is a major parameter of EWMA controller. Considering the high-mix characteristics of multi-product in practical manufacturing processes, we adopt the EWMA algorithm with time-varying discount factor to handle the slow convergence-rate in the product-switching phase. It improves the response speed while maintaining the stability of the process. The feasibility and advantages are demonstrated in simulations of practical processes.
%K run-to-run control
%K exponent weighted moving average
%K discount factor
%K product-based control<br>批间控制
%K 指数加权移动平均
%K 折扣因子
%K 基于产品的控制
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=8240383F08CE46C8B05036380D75B607&jid=970898A57DFC021F93AB51667BAED7F7&aid=EA300F39E1651F34092A00BB43ED8F5E&yid=DE12191FBD62783C&vid=96C778EE049EE47D&iid=F3090AE9B60B7ED1&sid=966760CE8B6E636C&eid=4442BFF895478018&journal_id=1000-8152&journal_name=控制理论与应用&referenced_num=0&reference_num=9