%0 Journal Article
%T Optical characterization of SOI Materials based on effective dielectric functions<br>基于有效介电函数的SOI材料的光学表征
%A 蒋泽
%A 周建超
%A 侯维娜
%J 重庆邮电大学学报(自然科学版)
%D 2011
%I 
%X The microstructure of silicon on insulator (SOI) was investigated by rutherford back scattering spectrometry (RBS), transmission electron microscope (TEM), auger electron spectroscopy (AES) and infrared reflection (IR) in other literatures. By analyzing and studying, a multi-layer stack configuration model of SOI with effective medium approximation function is set up. An optical characterization, based on the model, has been developed by simulation of infrared reflection spectrum using the aggregating reflection coefficients method. The result shows that the way of infrared reflection spectra is a sensitive analytical technique, which is capable of providing accurate optical character information, not only on the volume fraction of the inclusion of Si islands, but also on their geometric distribution.
%K SOI materials
%K infrared reflection
%K effective medium approximation
%K aggregating reflection coefficients<br>SOI材料
%K 红外光谱
%K 有效介质近似
%K 总反射系数
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=01BA20E8BA813E1908F3698710BBFEFEE816345F465FEBA5&cid=96E6E851B5104576C2DD9FC1FBCB69EF&jid=5C2694A2E5629ECD6B59D7B28C6937AD&aid=C3C889FD0D3CC16FE4E4D52BB9EBA301&yid=9377ED8094509821&vid=EA389574707BDED3&iid=B31275AF3241DB2D&sid=4D1A534FF6CD5D9A&eid=20D29EF591CB2C94&journal_id=1673-825X&journal_name=重庆邮电大学学报(自然科学版)&referenced_num=0&reference_num=0