%0 Journal Article
%T Simultaneous Patterning of Independent Metal/Metal Oxide Multi-Layer Films Using Two-Tone Photo-Acid Generating Compound Systems
%A Christopher E. J. Cordonier
%A Hideo Honma
%J Nanomaterials
%D 2012
%I MDPI AG
%R 10.3390/nano2040312
%X (1) The photo-induced solubility and positive-tone direct photo-patterning of iron, copper and lanthanides chelated with 4-(2-nitrobenzyloxycarbonyl)catechol (NBOC) or 4-(6-nitroveratryloxycarbonyl)catechol (NVOC) was investigated. Photo-patterning of iron, copper, cerium, samarium, europium, terbium, dysprosium, holmium, erbium and lutetium complexes was accomplished. Continuous films were formed by the pyrolysis of metal complex films at 500 ˇăC. (2) Based on the difference in the photo-reaction excitation wavelength profile of NBOC and NVOC complexes, a short and simple method for simultaneous micro-patterning of two independent films on each side of a transparent glass substrate was developed. Using the developed procedure, indium tin oxide and/or titanium oxide films were formed on each side of a quartz substrate without use of resist or etching.
%K photo-patterning
%K direct patterning
%K multi-layer films
%K multi-touch panel
%K iron
%K copper
%K lanthanides
%U http://www.mdpi.com/2079-4991/2/4/312