%0 Journal Article
%T SYNTHESIS AND THERMAL STABILITY OF NANOCOMPOSITE nc-TiN/a-TiB2 THIN FILMS<br>SYNTHESIS AND THERMAL STABILITY OF NANOCOMPOSITE nc-TiN／a-TiB2 THIN FILMS
%A YH Lu
%A ZF Zhou
%A P Sit
%A YG Shen
%A KY Li
%A HChen
%A <br>Y.H.Lu
%A Z.F.Zhou
%A P.Sit
%A Y.G.Shen
%A K.Y.Li
%A H.Chen
%J 金属学报(英文版)
%D 2005
%I 
%X Several nc-TiN/a-TiB2 thin films comprised of nanocrystalline (nc-) TiN and amorphous (a-) TiB2phases were deposited on Si(100)at room temperature by reactive unbalanced dc magnetron sputtering, followed by vacuum annealed at 400, 600, 800 and 1000℃ for 1h, respectively. Effects of B content on microstructure, mechanical behaviors and thermal microstructure stability have been investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), X-ray photoelectron spectroscopy (XPS) and nanoindentation measurements. The results indicated that B addition greatly affected both microstructure and mechanieal behavior of nc-TiN/a-TiB2 thin films. With increasing B content the grain size decreased. A maximum hardness value of about 33GPa was obtained at B content of about 19at. %. The improved mechanical properties of nc-TiN/a-TiB2films with the addition of B into TiN were attributed to their densified microstructure with development of fine grain size. Only addition of sufficient B could restrain grain growth during annealing. High B content resulted in high microstructure stability. The crystallization of amorphous matrix occurred at about 800℃, forming TiB or TiB2 crystallite, depending on B content. Before that no change in bonding configuration was found.
%K annealing
%K boron
%K reactive unbalanced dc magnetron sputtering
%K ther mal stability
%K nc-TiN/a-TiB2 thin film<br>退火处理
%K 硼
%K 不平衡dc磁溅射
%K 热稳定性
%K 钛镍硼薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=C19B08D052F5FD8445F4BB80A1A5D7BF&aid=364499E2EB7DB1C1D78E02B8CF01232C&yid=2DD7160C83D0ACED&vid=13553B2D12F347E8&iid=38B194292C032A66&sid=F416A9924F23B020&eid=7737D2F848706113&journal_id=1006-7191&journal_name=金属学报(英文版)&referenced_num=1&reference_num=12