%0 Journal Article
%T CARBON NITRIDE FILMS PREPARED AT DIFFERENT N2/Ar RATIOS BY CLOSED FIELD UNBALANCED REACTIVE MAGNETRON SPUTTERING<br>CARBON NITRIDE FILMS PREPARED AT DIFFERENT N2／Ar RATIOS BY CLOSED FIELD UNBALANCED REACTIVE MAGNETRON SPUTTERING
%A AVyas
%A KYLi
%A ZFZhou
%A YGShen
%A <br>A.Vyas
%A K.Y.Li
%A Z.F.Zhou
%A Y.G.Shen
%J 金属学报(英文版)
%D 2005
%I 
%X Carbon nitride (CNx) thin films have been deposited onto Si(100) (for structural and mechanical analyses) and M42 high-speed-steel (for tribological measurement s) substrates at room temperature by closed-field unbalanced magnetron sputterin g. The mechanical and tribological properties of these films were highly depende nt on the N/C concentration ratio that was adjusted by the F(N2)/F(Ar) flow-rate ratio at fixed substrate biasing of -60V during deposition. The films were char acterized by employing scanning electron microscopy (SEM), atomic force microsco py (AFM), nano-indentation measurements, X-ray photoelectron spectroscopy (XPS), Raman scattering and Fourier transform infrared (FTIR) spectroscopy, pin-on-dis c tribometer, scratch tester, and Rockwell-C tester. The results showed that the N content in the films increased with the N2 pressure. However, the maximum N/C ratio obtained was 0.25. The nanohardness was measured to be in the range of 11 .7-20.8GPa depending on the N/C ratios. The XPS N 1s spectra showed the existenc e of both N-C sp2 and N-C sp3 bonds in films. Raman and FTIR spectra exhibited t hat N-C bonds were fewer when compared to other N-C bonds. The friction coeffici ent of the film deposited onto steel substrate with N/C=0.26 was measured to be ~0.08 and for film with N/C=0.22 a high critical load of 70N was obtained. The t ribological data also showed that the wear rates of these films were in the rang e of ~10-16m3/Nm, indicating excellent wear resistance for CNx films.
%K carbon nitride
%K X-ray photoelectron spectroscopy
%K Raman spectroscop y
%K pin-on disc wear test
%K tribology<br>氮碳薄膜
%K 光电分光镜
%K 拉曼光谱仪
%K 磨损测试
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=C19B08D052F5FD8445F4BB80A1A5D7BF&aid=AB566F84ECEEE7729D9C8C997F729922&yid=2DD7160C83D0ACED&vid=13553B2D12F347E8&iid=38B194292C032A66&sid=5D8C08279A19B0D4&eid=334C61CAF4C8EF4E&journal_id=1006-7191&journal_name=金属学报(英文版)&referenced_num=0&reference_num=21