%0 Journal Article
%T Thermal Stability of A Novel Ti-Si-C-N Superhard Nanocomposite Coating at Elevated Temperature<br>新型Ti-Si-C-N纳米复合超硬薄膜的高温热稳定性
%A Yan Guo
%A <br>郭岩
%A 畅庚榕
%A 吴贵智
%A 马胜利
%A 徐可为
%J 金属学报
%D 2006
%I 
%X Superhard nanocomposite Ti-Si-C-N coatings were deposited on substrate of high speed steel using an industrial pulsed d.c. plasma chemical vapor deposition set-up. Dependence of Si and C contents and annealing at elevated temperatures on the microstructure and hardness of Ti-Si-C-N coatings were investigated. Detailed microstructure examined by means of X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and transmission electron microscopy (TEM) suggested that the Ti-Si-C-N coatings was a nanocomposite structure composed of nanocrystalline Ti(C,N) and amorphous carbon and Si3N4. And the crystalline size and microhardness of coatings showed high thermal stability even at 1000° C when Si and C contents were higher of 12.1 at.% Si, 32.9 at.% C. The possible origin of high thermal stability of superhard nanocomposite Ti-Si-C-N coatings is explained by spinodal decomposition that occurs during deposition.
%K Ti-Si-C N<br>纳米复合超硬薄膜
%K 晶粒尺寸
%K 显微硬度
%K 热稳定性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=14A2BA5842430976&yid=37904DC365DD7266&vid=ECE8E54D6034F642&iid=0B39A22176CE99FB&sid=9D453329DCCABB94&eid=5BC9492E1D772407&journal_id=0412-1961&journal_name=金属学报&referenced_num=2&reference_num=18