%0 Journal Article
%T Raman Spectra of Diamond-Like Carbon Films Deposited by Vacuum Cathodic Arc<br>真空阴极弧离子镀类金刚石碳膜Raman光谱研究
%A LI Liuhe
%A WU Yongqin
%A CUI Xuming
%A ZHANG Haiquan
%A ZHANG Yanhua
%A XIA Lifang
%A Paul K Chu
%A <br>李刘合
%A 武咏琴
%A 崔旭明
%A 张海泉
%A 张彦华
%A 夏立芳
%A 朱剑豪
%J 金属学报
%D 2004
%I 
%X The structures of diamond-like carbon (DLC) films deposited by vacuum arc evaporation with and without curve arc magnetic filter are studied and compared using Raman shifts. The Raman shifts are deconvolved into D peak and G peak with Gaussian-Lorentzion fitness. The effects of the deposition parameters such as bias voltage and bias current strength of curved magnetic fields on the DLC films structures are discussed. The results show that Ar gas pressure has not obvious effect on the formation of the DLC film; moderate bias current increases the sp3 content; the sp2 cluster can be increased for a too high substrate bias. The magnetic curved filter not only can remove the carbon macroparticles, but also can improve the sp3 content.
%K Raman spectrum
%K diamond-like carbon film
%K curved arc magnetic filter
%K bias current<br>Raman光谱
%K 类金刚石碳膜
%K 弯曲弧磁过滤器
%K 偏流
%K 真空阴极弧离子镀
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=E7D9E517D8C5082A&yid=D0E58B75BFD8E51C&vid=1371F55DA51B6E64&iid=0B39A22176CE99FB&sid=1D67BE204FBF4800&eid=A1266CF37D675CF1&journal_id=0412-1961&journal_name=金属学报&referenced_num=0&reference_num=12