%0 Journal Article
%T EFFECT OF Ti ON MICROSTRUCTURE OF STEEL 321 FILM SYNTHESIZED BY MAGNETRON SPUTTERING DEPOSITION<br>Ti对磁控溅射不锈钢薄膜结构的影响
%A YANG Dejun
%A ZHOU Honghui
%A LI Huiqin University of Science
%A Technology Beijing professor
%A <br>杨德钧
%A 周虹辉
%A 李辉勤
%J 金属学报
%D 1993
%I 
%X 研究了磁控溅射321不锈钢薄膜内Ti对膜结构由晶态向非晶态转化的影响用X射线衍射分析了膜的结构,结果表明,膜的结构随含Ti量不同而有变化在Ti含量(wt-％)为0—3,3—10,10-18,18-30时,膜的结构分别为α-Fe,α-Fe+x相,非晶+微晶,非晶态
%K magnetron sputtering
%K stainless steel film
%K Ti
%K microstructure<br>磁控溅射
%K 薄膜
%K 不锈钢
%K 钛
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=0FE0E4AD3B51BC6D50D569F53DE62481&yid=D418FDC97F7C2EBA&vid=771469D9D58C34FF&iid=E158A972A605785F&sid=35FC3610259C2B32&eid=656F8C8401D91023&journal_id=0412-1961&journal_name=金属学报&referenced_num=0&reference_num=1