%0 Journal Article
%T THE EFFECT OF PREFERRED ORIENTATION ON X-RAY STRESS MEASUREMENT<br>择优取向对X射线应力测试的影响
%A YU LigenHE Jiawen
%A B CHendrixCorrespondent: YU Ligen
%A Tel: -
%A Fad:
%A <br>于利根
%A 何家文
%A B.C.Hendrix
%J 金属学报
%D 1998
%I 
%X Based on the boundary conditions for prefer--oriellted polycrystals under loading,a new model for the calculation of X--ray elastic constallts (XEC) for prefer--oriented materials,the weighted Hill model, is proposed. The model is applied to calculate the X--my stress measurement curves of some model materials. In order to check the model, the stresses in electroplated and brush--plated copper films are measured. The experimelltal results have good comparison with the calculated results. This helps to explain the low op angle curVature of the stress measuremellt curve for plasma enhanced chemical vapor deposition (PCVD) TiN films. It is mainly caused by the columnar structure exsisted in the PCVD TiN films. When the stress measurement curve has a linear zone at the high op angle, it is suggested to use the slope of the linear zone for the stress calculation.
%K preferred orientation
%K thin film
%K X--ray elastic constant(XEC)
%K weighted Hill model
%K X--ray stress measurement<br>金属
%K 择优取向
%K 弹性性质
%K 加权Hill模型
%K X射线
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=AB188D3B70B071C57EB64E395D864ECE&jid=B061E1135F1CBDEE96CD96C109FEAD65&aid=ECDC9ECCF881A3E3D174DDF9C2C759FF&yid=8CAA3A429E3EA654&vid=339D79302DF62549&iid=B31275AF3241DB2D&sid=06DAE5E1DF7D0B6A&eid=B7DE0F3CA34DA149&journal_id=0412-1961&journal_name=金属学报&referenced_num=0&reference_num=1