%0 Journal Article
%T Application of Pyroelectric Thin Films in Infrared Detectors<br>热释电薄膜在红外探测器中的应用
%A WU Chuangui LIU Xingzhao ZHANG Wanli LI Yanrong
%A <br>吴传贵
%A 刘兴钊
%A 张万里
%A 李言荣
%J 红外
%D 2004
%I 
%X The pyroelectric effect and the operating modes of infrared detectors using ferroelectric thin films are described. The key technology of low temperature integration of pyroelectric thin film onto Si-reacl-out integrated circuits and the requirements for pyroelectric thin film are summarized. Through the development of low temperature growth of ferroelectric thin films (e.g. ion beam assisted deposition, buffer layer insertion) and composite element design, a pyroelectric thin film infrared detector with good performance has been developed.
%K ferroelectric thin film
%K pyroelectric
%K uncooled infrared focal plane array
%K low temperature deposition<br>铁电薄膜
%K 热释电效应
%K 非制冷红外焦平面阵列
%K 低温生长
%K 红外探测器
%K 离子束辅助沉积
%K 外延缓冲层
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=3723000AE493FCE650601982177048B1&aid=7FCE0DB530F90EF0&yid=D0E58B75BFD8E51C&vid=BC12EA701C895178&iid=38B194292C032A66&sid=94C357A881DFC066&eid=9CF7A0430CBB2DFD&journal_id=1672-8785&journal_name=红外&referenced_num=4&reference_num=16