%0 Journal Article
%T 用调制分光技术提高器件产量
%A Poll.
%A FH 顾聚兴
%J 红外
%D 1994
%I 
%K 分光学
%K 调制分光技术
%K 半导体器件
%K 产量
%K 光学器件
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=3723000AE493FCE650601982177048B1&aid=DC1530B9684A047B970E412954F5DD93&yid=3EBE383EEA0A6494&iid=708DD6B15D2464E8&sid=BC12EA701C895178&eid=DB817633AA4F79B9&journal_id=1672-8785&journal_name=红外&referenced_num=0&reference_num=0