%0 Journal Article
%T 光机电微系统概论（上）
%A 江刺正喜
%A 江涛
%J 红外
%D 1999
%I 
%K 光机电微系统
%K 微光机电
%K 光微系统
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=3723000AE493FCE650601982177048B1&aid=77449D30B22E6FFB43A47668374DA787&yid=B914830F5B1D1078&iid=0B39A22176CE99FB&sid=BC12EA701C895178&eid=96C778EE049EE47D&journal_id=1672-8785&journal_name=红外&referenced_num=0&reference_num=0