%0 Journal Article
%T Control of arsenic Pollution from waste gases during fabrication of semiconductor
%A Wen Ruimei
%A Liang Junwu
%A Deng Lisheng
%A Peng Yongqing
%A <br>Wen Ruimei
%A Liang Junwu
%A Deng Lisheng
%A Peng Yongqing
%J 环境科学学报(英文版)
%D 1994
%I 
%X The abatement technology of toxic arsenic pollution during fabrication of semiconductormaterials and devices has been studied.
%K Semiconductoro
%K arsenic
%K pollution
%K abatement<br>Semiconductoro
%K arsenic
%K pollution
%K abatement.
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=3FF3ABA7486768130C3FF830376F43B398E0C97F0FF2DD53&cid=A7CA601309F5FED03C078BCE383971DC&jid=6CB1530875F53489BF1E81BD87B7F5E6&aid=A3498137AD788876098E229D6985197F&yid=3EBE383EEA0A6494&vid=B31275AF3241DB2D&iid=CA4FD0336C81A37A&sid=AE09EACBCD1B2A13&eid=B344543C2864D684&journal_id=1001-0742&journal_name=Journalofenvironmentalsciences(China)&referenced_num=0&reference_num=0