%0 Journal Article
%T HIGH-SPEED Al2O3 -BASED SUBMOUNT FOR 40Gb/s ELECTROABSORPTION MODULATORS<br>应用于40Gb／s电吸收调制器的Al2O3高速热沉研究
%A TIAN Jian-Bai
%A XIONG Bing
%A WANG Jian
%A CAI Peng-Fei
%A SUN Chang-Zheng
%A LUO Yi
%A <br>田建柏
%A 熊兵
%A 王健
%A 蔡鹏飞
%A 孙长征
%A 罗毅
%J 红外与毫米波学报
%D 2006
%I Science Press
%X A high-speed submount was designed and fabricated for 40 Gb/s electroabsorption modulators(EAMs),and characterized in the chip-level packaging and testing of an EAM device.The Al_2O_3-based submount contains a coplanar waveguide(CPW) for microwave signal feeding and a Ta_2N thin-film resistor for impedance matching of EA modulator.Ti/Cu/Ni/Au metal is introduced as the CPW electrode material,and good contact with Ta_2N thin-film is guaranteed accordingly.Therefore,the typical reflection coefficient of the submount is reduced to be lower than-21 dB up to 40 GHz.As a demonstration,a high-speed EA modulator was packaged by using the high-speed submount,and the small-signal modulation bandwidth was measured to be over 40 GHz.
%K high-speed submount
%K electroabsorption modulator(EAM)
%K coplanar waveguide(CPW)
%K thin-film resistor
%K impedance matching<br>高速热沉
%K 电吸收调制器
%K 共面波导传输线
%K 薄膜电阻
%K 阻抗匹配
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=D5AB26E6A11CC2FA&yid=37904DC365DD7266&vid=C5154311167311FE&iid=0B39A22176CE99FB&sid=03F1579EF92A5A32&eid=6270DC1B5693DDAF&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=0&reference_num=11