%0 Journal Article
%T INTERFACE ANALYSIS OF DLC FILM DEPOSITED ON Hg_(1-x)Cd_xTe<br>碲镉汞衬底上沉积类金刚石薄膜的界面分析
%A JU Jian Hua
%A XIA Yi Ben
%A SANG Wen Bin
%A WANG Lin Jun
%A WU Wen Hai
%A TANG Ding Yan
%A <br>居建华
%A 夏义本
%A 桑文斌
%A 王林军
%A 吴汶海
%A 汤定元
%J 红外与毫米波学报
%D 2002
%I Science Press
%X A dense and homogeneous nanograins diamond like carbon(DLC)film was deposited on the well polished HgCdTe wafer by radio frequency plasma chemical vapor deposition at room temperature. The interface of DLC?HgCdTe was studied by AES and compared with that of ZnS?HgCdTe, which was prepared by ion sputtering(IS).The result shows that both DLC film and ZnS film can suppress the dissociation of the weak bonding HgTe, and prevent Hg escaping from MCT surface to some extent. However, both Zn and S in ZnS layer tend to diffuse inward MCT, while diffusion of C from DLC layer into MCT is rather slight. In particular, IR transmission of MCT deposited with DLC is remarkable raised comparing to the naked surface and higher than that of MCT deposited with ZnS.
%K Diamond like carbon
%K film
%K infrared
%K interfaces<br>碲镉汞衬底
%K 沉积
%K 类金刚石薄膜
%K 界面分析
%K 等离子增强化学气相法
%K 纳米颗粒
%K 光电器件
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=028EA23384E7DA19&yid=C3ACC247184A22C1&vid=659D3B06EBF534A7&iid=38B194292C032A66&sid=9CA95D22FC1D537C&eid=C812B90E96151014&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=0&reference_num=9