%0 Journal Article
%T DESIGN AND FABRICATION OF MICRO-CANTILEVER UNCOOLED INFRARED DETECTOR<br>微悬臂梁非致冷红外探测器的研制
%A LIU Hai-Tao
%A CHEN Yong-Ping
%A LIANG Ping-Zhi
%A <br>刘海涛
%A 陈永平
%A 梁平治
%J 红外与毫米波学报
%D 2006
%I Science Press
%X A micro-cantilever uncooled infrared(IR) detector was designed and fabricated based on standard silicon process.Because silicon nitride(S_iN_x) and aluminum(Al) have different thermal expansion coefficients,bi-material micro-cantilever that is composed of the films of S_iN_x and Al will bend when it absorbs IR radiation and its temperature changes.The variable micro-capacitor between the micro-cantilever and the substrate will change as the micro-cantilever bends.Hence,the information of IR radiation can be known when the change of the variable micro-capacitor is detected.The test of a single detector by outer apparatus shows that the micro-cantilever has strong response to IR radiation.
%K uncooled IR detector
%K micro-cantilever
%K capacitor
%K MEMS<br>非致冷红外探测器
%K 微悬臂梁
%K 电容
%K 微电子机械系统
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=85E3B541B221C972&yid=37904DC365DD7266&vid=C5154311167311FE&iid=CA4FD0336C81A37A&sid=D997634CFE9B6321&eid=2A3781E88AB1776F&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=4&reference_num=11