%0 Journal Article %T PREPARATION OF (Ba0.5Sr0.5)TiO3 THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS
溶胶—凝胶法制备BST铁电薄膜及性能研究 %A ZHAO Min %A
赵敏 %A 张荣君 %A 顾豪爽 陈铭南 %J 红外与毫米波学报 %D 2001 %I Science Press %X (Ba0.5Sr0.5)TiO3 ferroelectric t hin films were prepared by Sol-Gel processing. Films with thickness of 160nm t reated at 700℃ for 1h showed pure perovskite structure and good dielectric, ins ulating properties, i.e. a dielectric constant of 225, a dielectric loss of 0.04 4, a leakage current density of 8.0×10-8A/cm2. The leakage current density was found to depend on the annealing temperature. The measurement of the J-V characteristics on films indicated the conduction process to be bulk- limited. %K Ba %K 0 %K 5 %K Sr %K 0 %K 5 %K TiO %K 3 %K SOL %K GEL %K dielectric property %K leakage current
BST薄膜 %K 溶胶-凝胶法 %K 介电性能 %K 漏电流 %K 结构 %K 铁电薄膜 %U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=E8FA5C4A2CF93BE6&yid=14E7EF987E4155E6&vid=A04140E723CB732E&iid=CA4FD0336C81A37A&sid=B9704B40A4225A24&eid=228A710F49B6CE58&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=5&reference_num=8