%0 Journal Article
%T PREPARATION OF (Ba0.5Sr0.5)TiO3 THIN FILM BY SOL-GEL TECHNIQUE AND ITS CHARACTERISTICS<br>溶胶—凝胶法制备BST铁电薄膜及性能研究
%A ZHAO Min
%A <br>赵敏
%A 张荣君
%A 顾豪爽　陈铭南
%J 红外与毫米波学报
%D 2001
%I Science Press
%X (Ba0.5Sr0.5)TiO3 ferroelectric t hin films were prepared by Sol-Gel processing. Films with thickness of 160nm t reated at 700℃ for 1h showed pure perovskite structure and good dielectric, ins ulating properties, i.e. a dielectric constant of 225, a dielectric loss of 0.04 4, a leakage current density of 8.0×10－8A/cm2. The leakage current density was found to depend on the annealing temperature. The measurement of the J-V characteristics on films indicated the conduction process to be bulk- limited.
%K Ba
%K 0
%K 5
%K Sr
%K 0
%K 5
%K TiO
%K 3
%K SOL
%K GEL
%K dielectric property
%K leakage current<br>BST薄膜
%K 溶胶－凝胶法
%K 介电性能
%K 漏电流
%K 结构
%K 铁电薄膜
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=E8FA5C4A2CF93BE6&yid=14E7EF987E4155E6&vid=A04140E723CB732E&iid=CA4FD0336C81A37A&sid=B9704B40A4225A24&eid=228A710F49B6CE58&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=5&reference_num=8