%0 Journal Article
%T PREPARATION AND DIELECTRIC PROPERTIES OF LiTaO3 THIN FILM ON THE ITO SUBSTRATE<br>ITO衬底上LiTaO3薄膜的制备与介电特性
%A ZHANG De-Yin
%A HUANG Da-Gui
%A LI Jin-Hu
%A LI Kun
%A DAN Di-Di
%A DONG Zheng
%A <br>张德银
%A 黄大贵
%A 李金华
%A 李坤
%A 但迪迪
%A 董政
%J 红外与毫米波学报
%D 2007
%I Science Press
%X LiTaO3 thin films were prepared on the ITO substrate by sol-gel methods.The performance parameters such as orientation,surface morphology,grain size and the thickness of LiTaO3 thin film were studied by XRD,SEM and AFM.The influence of different solvents on the stability of LiTaO3 sols and the influence of different annealing condition on the preparation of LiTaO3 thin film were analyzed either.The relative dielectric coefficient and dielectric loss of the prepared LiTaO3 thin film were measured by using Al/LiTaO3/ITO structure electrode.The experimental results show that the quality of LiTaO3 thin film with every layer crystallized annealing is better than that with pyrolyzed and crystallized annealing alternately.The relative dielectric coefficient is about 53 and dielectric loss is about 0.4 when the measured frequency is 1kHz.The reason of increaing the dielectric loss of LiTaO3 thin film has been discussed.
%K LiTaO3 thin film
%K ITO substrate
%K annealing condition
%K dielectric properties<br>钽酸锂薄膜
%K ITO衬底
%K 退火条件
%K 介电特性
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=7027598BB1987DA89121B2B7AD8F1EB0&yid=A732AF04DDA03BB3&vid=96C778EE049EE47D&iid=38B194292C032A66&sid=C5F8B8CB20F1B3D8&eid=DABEF202280E7EF1&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=7&reference_num=8