%0 Journal Article
%T DEVELOPMENT OF UNCOOLED INFRARED MICROBOLOMETER<br>非制冷红外微测辐射热计的研制
%A LIU Xi
%A Ding
%A JIANG Mei
%A Ling
%A FENG Xiao
%A Mei
%A DING Ai
%A Di
%A LIANG Ping
%A Zhi
%A SHEN Xue
%A Chu
%A <br>刘西钉
%A 江美玲
%J 红外与毫米波学报
%D 1997
%I Science Press
%X 采用多晶硅薄膜材料作为热敏电阻材料，以普通的ＩＣ工艺及微机械加工技术研制成功了在室温下工作的红外微测辐射热计，其多晶硅电阻温度系数为－２％℃－１，探测率Ｄ＊达２×１０８ｃｍ·Ｈｚ１／２·Ｗ－１．
%K poly
%K Si
%K uncooled microbolometer<br>多晶硅，非制冷微测辐射热计
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=76DDD033259936E52F4477D366B33F3B&yid=5370399DC954B911&vid=7801E6FC5AE9020C&iid=B31275AF3241DB2D&sid=3389C664025A98F9&eid=8C5DE51F0A009A0F&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=6&reference_num=0