%0 Journal Article
%T CHARACTERISTICS OF PSD233 POSITION SENSITIVE DETECTOR AND ITS APPLICATION IN ATOMIC FORCE MICROSCOPE<br>PSD233型位置敏感元件的特性及其在AFM中的应用
%A ZHANG Dong
%A Xian ZHANG Hai
%A Jun LIN Xiao
%A Feng
%A <br>张冬仙
%A 章海军
%A 林晓峰
%J 红外与毫米波学报
%D 2003
%I Science Press
%X The spectral response of 3mm×3mm position sensitive detector (PSD) covering a wide spectral range from 320nm to 1150nm. The beam deflection method was employed to determine the temporal response and position sensitive properties of the PSD. As an application of the PSD, we developed a horizontal atomic force microscope(AFM), introduced the basic concept and controlling system of the AFM, and presented some sample images scanned by the AFM. The results show that the horizontal AFM is an effcient system for image acquisition, which has an excellent repeatability, reliable stability and ideal image contrast. The maximum scan range is up to 5μm×5μm, and the resolution of the AFM is at the nanometer scale. It is obvious that the new PSD is of outstanding characteristics of spectral response, temporal response and position sensitive property.
%K PSD
%K spectral response
%K AFM
%K nanotechnology<br>光谱响应
%K 纳米技术
%K 原子力显微镜
%K AFM
%K 光谱响应
%K 光束偏转法
%K 位置敏感元件
%K 分辨率
%K PSD233型
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=5B3AB970F71A803DEACDC0559115BFCF0A068CD97DD29835&cid=1319827C0C74AAE8D654BEA21B7F54D3&jid=D3B4F771D1A06062008B4D0A2EF05996&aid=175AF983CFDE90C8&yid=D43C4A19B2EE3C0A&vid=BC12EA701C895178&iid=94C357A881DFC066&sid=05340B75C67FF664&eid=3BAAE0DA6093AC05&journal_id=1001-9014&journal_name=红外与毫米波学报&referenced_num=0&reference_num=10