%0 Journal Article
%T Integrated Thermal and Microcoriolis Flow Sensing System with a Dynamic Flow Range of More Than Five Decades
%A Joost C. L£¿tters
%A Theo S.J. Lammerink
%A Jarno Groenesteijn
%A Jeroen Haneveld
%A Remco J. Wiegerink
%J Micromachines
%D 2012
%I MDPI AG
%R 10.3390/mi3010194
%X We have realized a micromachined single chip flow sensing system with an ultra-wide dynamic flow range of more than five decades, from 100 nL/h up to more than 10 mL/h. The system comprises both a thermal and a micro Coriolis flow sensor with partially overlapping flow ranges.
%K integrated microsystems
%K thermal flow sensors
%K Coriolis flow sensors
%K surface channel technology
%U http://www.mdpi.com/2072-666X/3/1/194