%0 Journal Article
%T Three Half-wave Filter and Analysis of Layer Thickness<br>三半波带通滤光片的制作与膜厚分析
%A (Shanghai Institute of Technological Physics
%A Chinese Academy of Sciences
%A Shanghai
%A <br>张子业
%A 周东平
%A 张凤山
%J 光子学报
%D 2005
%I 
%X Tooling factor is one of the most important parameters in optical thin film coating process. Calculation indicates that, while coating three half-wave filter, it is possible to roughly get this factor from the passband center position, factor variation and factor difference of different materials from the shape of measurement curve. With this method, we have produced several kinds of bandpass fileters.
%K Film optics
%K Three half-wave filter
%K Tooling factor
%K Thickness analyzing<br>薄膜光学
%K 三半波滤光片
%K 比例系数
%K 膜厚分析
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=B6B94CBA4DC0A077&yid=2DD7160C83D0ACED&vid=339D79302DF62549&iid=94C357A881DFC066&sid=2868AE484E7BAD6B&eid=AB720B703F452703&journal_id=1004-4213&journal_name=光子学报&referenced_num=6&reference_num=6