%0 Journal Article
%T Properties of ZnO Thin Films with Effect of Substrate Temperature by PLD<br>不同衬底温度下PLD法制备的氧化锌薄膜的特性
%A SU Xue-qiong
%A WANG Li
%A CHEN Jiang-bo
%A KONG Le
%A LIU Hong-mei
%A ZHANG Xin-ping
%A <br>苏雪琼
%A 王丽
%A 陈江博
%A 孔乐
%A 刘红梅
%A 张新平
%J 光子学报
%D 2010
%I 
%X ZnO thin films are deposited on sapphire (0001) substrates by a high-purity ZnO target and a pulsed Nd:YAG laser with a wavelength of 355 nm.The structural,optical and electrical properties of ZnO thin films are grown and investigated in various substrate temperatures.The morphological propertie of the films is analyzed by atomic force microscopy (AFM).The optical properties and electrical properties of the films are investigated by Raman scattering and ultraviolet photoluminescence (PL) emission and FTIR H...
%K PLD
%K ZnO films
%K AFM
%K Raman
%K photoluminescence<br>脉冲激光沉积
%K 氧化锌薄膜
%K 原子力显微镜
%K 拉曼光谱
%K 光致发光
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=8F10448CB15EC823D7DF012B523D578F&yid=140ECF96957D60B2&vid=7C3A4C1EE6A45749&iid=0B39A22176CE99FB&sid=D0182A31A5EB14BA&eid=B1E36BF7B9783A85&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=5