%0 Journal Article
%T Plate Waveguides Fabrication and Test by Sol-gel Coating Method<br>平板波导的溶胶-凝胶法制备与测试
%A ZHANG Zhi-lin
%A YE Miao
%A SUN Wei-min
%A <br>张志林
%A 叶淼
%A 孙伟民
%J 光子学报
%D 2009
%I 
%X Using sol-gel coating method,TiO2 plane waveguides were fabricated on glass substrates under different conditions.Many factors that can influence the quality of the plane waveguide,such as the concentrations of sol-gel solutions,the pH value of the solutions,the dripping speed of the sol-gel drop,the heating process and so on,were analyzed.The characteristics of plane waveguides under different operating conditions were tested.The factors affecting the quality of the plane waveguide were analyzed.The experimental results show that the sol-gel coating method is a simple way to fabricate high quality plane waveguide under carefully controlling of the conditions.
%K Plane waveguide
%K Fabrication
%K Sol-gel coating<br>平板波导
%K 制作
%K 溶胶-凝胶
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=AFCBD1907C6DAD5A76F058EE198D30DE&yid=DE12191FBD62783C&vid=16D8618C6164A3ED&iid=38B194292C032A66&sid=B4F9D541F855CF96&eid=90075EB19043D533&journal_id=1004-4213&journal_name=光子学报&referenced_num=1&reference_num=7