%0 Journal Article
%T One-dimensional Transverse Superresolution Achieved by Three-zone Dissymmetrical Pupil Filter<br>非对称三区光瞳滤波器实现一维横向超分辨
%A GUO Shu-wen
%A GUO Han-ming
%A ZHUANG Song-lin
%A <br>郭舒文
%A 郭汉明
%A 庄松林
%J 光子学报
%D 2008
%I 
%X Based on the rigorous vector imaging theory of an optical system,taking the optical imaging system with amplification of 1/4 and the x linearly polarized illumination as an example,the transverse electric field expression in focal region was obtained when the x linearly polarized light passes through an optical system with high numerical aperture modulated by a pupil filter.A new kind of dissymmetrical three-zone phase pupil filter was designed by studying in detail such parameters of the three-zone complex pupil filter as the influences of the normalized radiuses of the inner and outer zones,the phase distribution in each zone,and the transmittance t of the first zone on the superresolution gain ratio Gty,the Strehl ratio Sy and the relative intensity ratio of the sidelobe to that of the central lobe Iry in y direction,respectively.According to the simulation results,Gty=0.834 5,Sy=0.408 7,and Iry=0.492 3 are achieved,and the designed phase pupil filter can improve the resolution in transverse y direction by nearly 20% in contrast to that in the optical imaging system without pupil filter.This new kind of three-zone dissymmetrical phase pupil filter with superresolution in a single transverse direction can be effectively applied to the resolution enhancement technology (RET) in an advanced photolithography with the double exposure technique.
%K Information optics
%K Vector diffraction
%K Superresolution
%K Pupil filter<br>信息光学
%K 矢量衍射
%K 超分辨
%K 光瞳滤波器
%K 双重曝光
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=2B48D045FDD3CC9851BC8E7DBA115B01&yid=67289AFF6305E306&vid=42425781F0B1C26E&iid=708DD6B15D2464E8&sid=BBE4941DB42FA885&eid=A07AB8F8354CD3EE&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=9