%0 Journal Article
%T The Application of Genetic Algorithm in Thin Film Characters Measurement<br>遗传算法在薄膜特性参量测量中的应用
%A GONG Xing-zhi
%A CHEN Yan-ping
%A LIU Yu-ling
%A YU Fei-hong
%A <br>宫兴致
%A 陈燕平
%A 刘玉玲
%A 余飞鸿
%J 光子学报
%D 2007
%I 
%X By using Genetc Algorithm(GA), global optimization model was constructed, in which optical constans are measured as parameters. Results were optimized by using genetic and aberrance iterative calculations. The damage of samples which is indeed by contact measurement is avoided. This method is simple and have good stabilization with high accuracy. During experiment the one-layer ideal model error is less than 1 nm, and the real model error according to atomic profiler is less than 20 nm.
%K Film parameters measurement
%K GA
%K Non-contact measurement
%K Global optimization<br>薄膜参量测量
%K 遗传算法
%K 非接触测量
%K 全局优化算法
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=E813764959C2022159A22BA09B4C9F2F&yid=A732AF04DDA03BB3&vid=933658645952ED9F&iid=708DD6B15D2464E8&sid=84307FA918B9F395&eid=112F428C63DFB16D&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=8