%0 Journal Article
%T Fabrication of Infrared Microlens Array Using Atomic Force Microscope<br>原子力显微镜加工红外微透镜阵列的研究
%A KUANG Deng-feng
%A FANG Zhi-liang
%A YANG Yong
%A <br>匡登峰
%A 方志良
%A 杨勇
%J 光子学报
%D 2007
%I 
%X Infrared microlens array on the substrate of Si,Ge,and GaAs fabricated with atomic force microscope gray scale anodic oxidation was presented.A 3×3 infrared silicon micro-lens array was fabricated using this method.The repeatability errors of the height and surface diameter of the nine microlens respectively were 0.2 nm and 6.0nm.The average curvature radius of the microlens was 510.8 nm.The causes of surface figure errors of infrared microlens fabricated with atomic force microscope anodic oxidation were studied and the methods of reducing surface figure errors were put forward.Refractive,diffractive and hybrid infrared microlens arrays fabricated with this approach can be developed to further reduce the size of infrared imaging system.
%K Microlens array
%K Infrared focal plane array
%K Atomic force microscope anodic oxidation
%K Gray scale<br>微透镜阵列
%K 红外焦平面阵列
%K 原子力显微镜阳极氧化
%K 灰阶
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=B05933CCA3888B54B6F681FE6AFC0232&yid=A732AF04DDA03BB3&vid=933658645952ED9F&iid=E158A972A605785F&sid=00520952CD4BF212&eid=A0C7970CD30381EA&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=15