%0 Journal Article
%T Measuring Nanoscale Motions of Microdevices Using a Mirau Interferometer<br>利用Mirau显微干涉仪测量微器件的纳米级运动
%A (State Key Laboratory of Precision Measuring Technology
%A Instruments
%A Tianjin University
%A Tianjin
%A <br>郭彤
%A 胡春光
%A 胡晓东
%A 栗大超
%A 金翠云
%A 傅星
%A 胡小唐
%J 光子学报
%D 2005
%I 
%X A Mirau microscopic interferometric system for measuring three-dimensional motions of microelectromechanical systems (MEMS) with nanometer resolution is demonstrated.The system utilizes a commercial Mirau microscopic interferometer,which mounts directly on a light microscope.The system was used for full three dimensional motion measurement of a surface micromachined lateral resonator.In-plane motions were determined from stop-action bright field images taken at the best plane of focus.Out-of-plane motions were determined from stroboscopic interferograms obtained at eight different positions of the objective nanopositioner.Experimental results demonstrate nanometer resolution for both in-plane and out-of plane motions.
%K Microelectromechanical systems (MEMS)
%K Mirau microscopic interferometer
%K In-plane motion
%K Out-of-plane motion
%K Stroboscopic illumination<br>微机电系统
%K Mirau显微干涉仪
%K 面内运动
%K 离面运动
%K 频闪照明
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=74C0E850516807E9&yid=2DD7160C83D0ACED&vid=339D79302DF62549&iid=F3090AE9B60B7ED1&sid=111DC5BD3401BA43&eid=05487D1A4AAEBAA6&journal_id=1004-4213&journal_name=光子学报&referenced_num=3&reference_num=9