%0 Journal Article
%T A Micromachining Based Miniature Variable Optical Attenuator<br>超小型非硅基微机械可调光衰减器
%A Wan Peng
%A Yuan Ye
%A Wu Xingkun
%A <br>万鹏
%A 袁野
%A 吴兴坤
%J 光子学报
%D 2006
%I 
%X A novel design of micro-machined variable optical attenuator (VOA) with a packaged size as small as 25 × 10 × 7 mm3 is presented. Attenuation was introduced by a rotatable miniature silicon mirror,with its orientation finely adjusted through the balance between a pair of electromagnetic forces. The design is free of conventional spring restoring force for attenuation reset and therefore ensures a high stability. The realizing structure was fabricated by EDM micro-machining as well as laser spot welding. VOA prototypes exhibit a wide attenuation range of 40 dB with an insertion loss of 0.8 dB and backreflection of －50 dB. The measured result was compared with that of an FEA model using ANSYS software package and a good agreement was obtained. The VOA can be arrayed for effective signal balancing and device protection in WDM/DWDM network systems.
%K Fiber-optic communication technology
%K Variable optical attenuator
%K MEMS
%K EDM
%K DWDM<br>光纤通信技术
%K 可调光衰减器(VOA)
%K 微机械(MEMS)
%K 电火花加工(EDM)
%K 密集波分复用(DWDM)
%U http://www.alljournals.cn/get_abstract_url.aspx?pcid=6E709DC38FA1D09A4B578DD0906875B5B44D4D294832BB8E&cid=47EA7CFDDEBB28E0&jid=9F6139E34DAA109F9C104697BF49FC39&aid=FB1F8437EE147C22&yid=37904DC365DD7266&vid=6209D9E8050195F5&iid=F3090AE9B60B7ED1&sid=CAF3E71A6764366D&eid=D80AE3757B45ED33&journal_id=1004-4213&journal_name=光子学报&referenced_num=0&reference_num=6